EPI (epitaxial) reactor

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Epitaxy — refers to the method of depositing a monocrystalline film on a monocrystalline substrate. The deposited film is denoted as epitaxial film or epitaxial layer. The term epitaxy comes from a Greek root ( epi above and taxis in ordered manner ) which … Wikipedia
Microelectromechanical systems — (MEMS) (also written as micro electro mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems) is the technology of very small mechanical devices driven by electricity; it merges at the nano scale into… … Wikipedia
Sistemas microelectromecánicos — Un ácaro cerca de un grupo de engranajes producidos utilizando MEMS. Cortesía de los Laboratorios Nacionales Sandia (Sandia National Laboratories), tecnologías SUMMiTTM, www.mems.sandia.gov. Sistemas Microelectromecánicos (Microelectromechanical… … Wikipedia Español

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